Nubwo laser zikora vuba cyane zimaze imyaka ibarirwa muri za mirongo, ikoreshwa mu nganda ryariyongereye cyane mu myaka makumyabiri ishize. Mu 2019, agaciro ka ultrafast ku isoko kariyongereye cyane.ibikoresho bya laserGutunganya byari hafi miliyoni 460 z'amadolari y'Amerika, aho igipimo cy'iterambere ry'ibice bitandatu cya 13%. Ahantu hakoreshwa lasers zihuta cyane mu gutunganya ibikoresho by'inganda harimo gukora no gusana udupfukamunwa tw'ifoto mu nganda za semiconductor ndetse no gukata silicon, gukata/gushushanya ikirahure na (indium tin oxide) gukuraho filime ya ITO mu bikoresho by'ikoranabuhanga nka telefoni zigendanwa na tableti, gushushanya piston mu nganda z'imodoka, gukora stent ya coronary no gukora ibikoresho bya microfluidic mu nganda z'ubuvuzi.
01 Gukora no gusana udupfukamunwa tw'amafoto mu nganda za semiconductor
Imashini zikoresha imirasire ya Ultrafast zakoreshejwe mu nganda za mbere mu gutunganya ibikoresho. IBM yatangaje ko ikoreshwa rya femtosecond laser ablation mu gukora photomask mu myaka ya 1990. Ugereranyije na nanosecond laser ablation, ishobora gutera icyuma gisesagura cyangwa kwangiza ikirahure, femtosecond laser masks nta cyuma gisesagura cyangwa cyangiza ikirahure, nta n'ibindi. Ibyiza byabyo. Ubu buryo bukoreshwa mu gukora imirasire ihuriweho (ICs). Gukora chip ya IC bishobora gusaba masks zigera kuri 30 kandi bigatwara >$100.000. Gutunganya Femtosecond laser bishobora gutunganya imirongo n'ingingo biri munsi ya 150nm.
Ishusho ya 1. Gukora no gusana udupfukamunwa tw'amafoto
Ishusho ya 2. Ibisubizo byo kunoza imiterere itandukanye ya maske kuri lithography ya ultraviolet ikabije
02 Gukata silicon mu nganda za semiconductor
Gukata silicon wafer ni inzira isanzwe yo gukora mu nganda za semiconductor kandi akenshi bikorwa hakoreshejwe uburyo bwo gukata ibyuma. Izi pine zo gukata akenshi zigira uduce duto kandi biragoye gukata ibyuma bito (urugero: ubugari < 150 μm). Gukata ibyuma bya silicon wafer hakoreshejwe laser bimaze imyaka myinshi bikoreshwa mu nganda za semiconductor, cyane cyane ku bikoresho bito (100-200μm), kandi bikorwa mu ntambwe nyinshi: gukata ibyuma hakoreshejwe laser, hagakurikiraho gukata ibyuma hakoreshejwe laser cyangwa gukata mu buryo buhishe (urugero: infrared laser beam imbere muri silicon scribing) hagakurikiraho gukata ibyuma hakoreshejwe mechanical. Laser ya nanosecond pulse ishobora gutunganya ibyuma 15 ku isaha, naho laser ya picosecond ishobora gutunganya ibyuma 23 ku isaha, bifite ubuziranenge bwo hejuru.
03 Gukata/gushushanya ikirahure mu nganda z'ibikoresho by'ikoranabuhanga bikoreshwa
Ecran zo gukoraho n'indorerwamo zo kurinda za telefoni zigendanwa na mudasobwa zigendanwa birimo kuba nto kandi imiterere imwe n'imwe iragoramye. Ibi bituma gukata bisanzwe bya mashini bigorana. Indabyo zisanzwe za laser zikunze gukora nabi, cyane cyane iyo izi ndabyo zishyirwa hamwe mu byiciro 3-4 kandi ikirahuri cyo hejuru gifite ubugari bwa 700 μm kikaba cyoroshye, gishobora kwangirika bitewe n'umuvuduko wacyo. Byagaragaye ko laser zihuta cyane zishobora gukata izi ndabyo zifite imbaraga nyinshi. Ku gukata ahantu hanini harambuye, laser ya femtosecond ishobora kwibanda ku buso bw'inyuma bw'urupapuro rw'ikirahure, igakurura imbere mu kirahure idakoze ku buso bw'imbere. Hanyuma ikirahure gishobora kuvunika hakoreshejwe uburyo bwa mashini cyangwa ubw'ubushyuhe hakurikijwe imiterere yafashwe.
Ishusho ya 3. Gukata ikirahure cya Picosecond ultrafast laser hakoreshejwe ishusho yihariye
04 Imiterere ya Piston mu nganda z'imodoka
Moteri zoroheje zikozwe mu byuma bya aluminiyumu, bidapfa kwangirika nk'ibyuma bishongeshejwe. Ubushakashatsi bwagaragaje ko gutunganya imiterere ya piston y'imodoka hakoreshejwe laser ya femtosecond bishobora kugabanya kwangirika kugeza kuri 25% kuko imyanda n'amavuta bishobora kubikwa neza.
Ishusho ya 4. Uburyo bwo gutunganya moteri ya moteri y'imodoka hakoreshejwe laser ya Femtosecond kugira ngo moteri irusheho gukora neza
05 Gukora stent yo mu mitsi yo mu bwonko mu nganda z'ubuvuzi
Impuzankano za miliyoni z'imitsi y'umutima zishyirwa mu mitsi y'umutima kugira ngo zifungure umuyoboro w'amaraso mu mitsi y'umutima yari yazibye, bityo bikize ubuzima bwa miliyoni buri mwaka. Impuzankano za coronary zikunze gukorwa mu byuma (urugero: icyuma kidashonga, nickel-titanium shape memory alloy, cyangwa cobalt-chromium alloy iherutse gukorwa) ifite ubugari bwa strut bungana na μm 100. Ugereranyije no gukata laser y'imitsi miremire, ibyiza byo gukoresha laser yihuta cyane mu gukata uduce duto ni ubwiza bwo hejuru, imiterere myiza y'ubuso, n'imyanda mike, bigabanya ikiguzi cyo gutunganya nyuma yo kuyitunganya.
06 Gukora ibikoresho bya microfluidic mu nganda z'ubuvuzi
Ibikoresho bya microfluidic bikunze gukoreshwa mu buvuzi mu gupima no gusuzuma indwara. Ibi bikunze gukorwa hakoreshejwe uburyo bwa micro-injection molding ku bice bimwe na bimwe hanyuma bigahuza hakoreshejwe kole cyangwa gusudira. Gukora ibikoresho bya microfluidic hakoreshejwe laser ya Ultrafast bifite akarusho ko gukora imiyoboro mito ya 3D mu bikoresho bibonerana nk'ibirahure nta mpamvu yo kubihuza. Uburyo bumwe ni ugukora laser ya ultrafast mu kirahure kinini hagakurikiraho gushushanya imiti itose, ubundi ni femtosecond laser ablation mu kirahure cyangwa pulasitiki mu mazi asukuye kugira ngo ukureho imyanda. Ubundi buryo ni ugukoresha imashini mu buso bw'ikirahure no kuzifunga n'igipfundikizo cy'ikirahure binyuze muri femtosecond laser welding.
Ishusho ya 6. Femtosecond-induced laser selective etching yo gutegura imiyoboro ya microfluidic mu bikoresho by'ikirahure
07 Gucukura mikoro mu munwa w'injekteri
Imashini itunganya imiyoboro ya laser ya Femtosecond yasimbuye mini-EDM mu bigo byinshi biri ku isoko ry’imashini zikoresha umuvuduko mwinshi bitewe no guhinduka cyane mu guhindura imiterere y’imiyoboro y’amazi n’igihe gito cyo kuyitunganya. Ubushobozi bwo kugenzura mu buryo bwikora aho ifatizo riherereye no kugorama k’umuyoboro unyuze mu mutwe upima ibintu byakozwe bwatumye hakorwa imiterere y’imiyoboro y’amazi (urugero: umuyoboro, umurabyo, guhuza, gutandukana) bishobora gutuma habaho atomization cyangwa kwinjira mu cyumba cyo gutwika. Igihe cyo gucukura giterwa n’ingano y’amazi akoreshwa, afite ubugari bwa mm 0.2 - 0.5 n’umurambararo w’imiyoboro wa mm 0.12 - 0.25, bituma ubu buryo bwihuta inshuro icumi kurusha micro-EDM. Imashini icukura imiyoboro ikorwa mu byiciro bitatu, harimo no gukaraba no kurangiza imyobo ikoresha ikoranabuhanga. Argon ikoreshwa nk'umwuka w’inyongera mu kurinda imyobo y’amazi kugira ngo idashyuha no kurinda plasma ya nyuma mu byiciro bya mbere.
Ishusho ya 7. Uburyo bwo gutunganya neza umwobo wa taper uhinduriwe isura wa moteri ya mazutu hakoreshejwe laser ya Femtosecond
08 Guhindura imiterere ya laser yihuta cyane
Mu myaka ya vuba aha, kugira ngo kunoze uburyo bwo gutunganya ibikoresho, kugabanya kwangirika kw'ibikoresho, no kongera imikorere myiza, ubushakashatsi bwa micromachining bwagiye burushaho kuba ikintu cy'ingenzi mu bushakashatsi. Ultrafast laser ifite ibyiza bitandukanye byo gutunganya ibikoresho nko kwangirika guke no gukora neza cyane, byaje kuba intego yo guteza imbere iterambere ry'ikoranabuhanga ryo gutunganya ibikoresho. Muri icyo gihe, ultrafast laser ishobora gukora ku bikoresho bitandukanye, kandi kwangirika kw'ibikoresho byo gutunganya ibikoresho nabyo ni icyerekezo gikomeye cy'ubushakashatsi. Ultrafast laser ikoreshwa mu gukura ibikoresho. Iyo ingufu za laser zirenze urugero rw'ingano y'ibikoresho, ubuso bw'ibikoresho byometseho bugaragaza imiterere ya micro-nano ifite imiterere imwe n'imwe. Ubushakashatsi bwerekana ko iyi miterere yihariye y'ubuso ari ikintu gikunze kubaho iyo ibikoresho byo gutunganya ibikoresho bya laser bitunganywa. Gutegura imiterere ya micro-nano ku buso bishobora kunoza imiterere y'ibikoresho ubwabyo ndetse no gutuma habaho iterambere ry'ibikoresho bishya. Ibi bituma gutegura imiterere ya micro-nano ku buso hakoreshejwe ultrafast laser ari uburyo bwa tekiniki bufite akamaro gakomeye mu iterambere. Muri iki gihe, ku bikoresho by'icyuma, ubushakashatsi ku bijyanye no gutunganya ubuso bwa laser bushobora kunoza imiterere y'icyuma yo kunywesha ubuso, kunoza imiterere yo kwangirika no kwangirika kw'ubuso, kunoza uburyo bwo gufatana kw'imvange, no kwiyongera no gufatana kw'uturemangingo mu cyerekezo.
Ishusho ya 8. Imiterere ya superhydrophobic y'ubuso bwa silikoni buteguwe na laser
Nk'ikoranabuhanga rigezweho ryo gutunganya, gutunganya laser yihuta cyane bifite imiterere y'agace gato gafite ubushyuhe, inzira idahuza ibikoresho, no gutunganya ifite ubushobozi bwo hejuru burenze umupaka w'ihindagurika ry'ikirere. Ishobora gukora ibikoresho bitandukanye mu buryo bwiza kandi bunoze kandi bunoze. Ishobora gukora ibikoresho bitandukanye mu buryo bwa micro-nano. Kugera ku ikorwa rya laser ry'ibikoresho byihariye, imiterere igoye n'ibikoresho byihariye bifungura inzira nshya zo gukora micro-nano. Kuri ubu, laser ya femtosecond imaze gukoreshwa cyane mu nzego nyinshi za siyansi zigezweho: laser ya femtosecond ishobora gukoreshwa mu gutegura ibikoresho bitandukanye by'urumuri, nka microlens arrays, bionic compound eyes, optical waveguides na metasurfaces; ikoresheje ubuhanga bwayo bwo hejuru, ubushobozi bwo gutunganya bufite ubushobozi bwo hejuru kandi bufite ubushobozi bwo gutunganya bufite ubushobozi bwo hejuru, laser ya femtosecond ishobora gutegura cyangwa guhuza microfluidic na optofluidic chips nk'ibice bya microheater na microfluidic channels zifite imiterere itatu; Byongeye kandi, laser ya femtosecond ishobora no gutegura ubwoko butandukanye bw'imiterere mito y'ubuso kugira ngo igere ku mikorere irwanya kugaragara, irwanya kugaragara, irwanya cyane amazi, irwanya ibara ry'urubura n'indi mirimo; si ibyo gusa, laser ya femtosecond nayo yakoreshejwe mu rwego rwa biomedicine, igaragaza imikorere myiza mu nzego nka micro-stents za biological, substrates za cell culture na microscope imaging. Ibyiza bigari byo gukoreshwa. Muri iki gihe, amashami yo gukoresha laser ya femtosecond arimo kwiyongera umwaka ku wundi. Uretse micro-optics zavuzwe haruguru, microfluidics, micro-nanostructures zifite imikorere myinshi n'ubuhanga mu by'ubuvuzi, inagira uruhare runini mu nzego zimwe na zimwe zikiri kuzamuka, nko gutegura metasurface. , gukora micro-nano no kubika amakuru y'urumuri mu buryo bwinshi, nibindi.
Igihe cyo kohereza ubutumwa: 17 Mata 2024
