Ihame, ubwoko n'ikoreshwa ry'ikoranabuhanga ryo gusukura hakoreshejwe laser

Ihame, ubwoko n'ishyirwa mu bikorwa ryaisuku ya laserikoranabuhanga

Ikoranabuhanga ryo gusukura laser ni uburyo bwiza bwo gukoresha ikoranabuhanga rya laser mu rwego rw'ubuhanga. Ihame ryaryo ry'ibanze ni ugukoresha ingufu nyinshi za laser kugira ngo zihuze n'imyanda ifata ku gice cy'umuyoboro w'ibikoresho, bigatuma zitandukana n'igice cy'umuyoboro mu buryo bwo kwaguka kw'ubushyuhe, gushonga no guhumeka kwa gaze. Ikoranabuhanga ryo gusukura laser rirangwa no gukora neza cyane, kubungabunga ibidukikije, no kubungabunga ingufu. Ryakoreshejwe neza mu bikorwa nko gusukura ibumba ry'amapine, gukuraho irangi ry'umubiri w'indege, no gusana ibisigazwa by'umuco.

Ikoranabuhanga gakondo ryo gusukura ririmogusukura ibyuma bivanze n'imitsi(gusukura umucanga, gusukura amazi hakoreshejwe umuvuduko mwinshi, nibindi), gusukura imiti yangiza, gusukura hakoreshejwe ikoranabuhanga, gusukura urubura rwumutse, nibindi. Ubu buryo bwo gusukura bwakoreshejwe cyane mu nganda zitandukanye. Urugero, gusukura umucanga bushobora gukuraho ibizinga by'icyuma, uduce tw'icyuma, na vernis ifite ubushobozi butatu ku mbaho ​​z'amashanyarazi binyuze mu guhitamo ibintu bikomeye bitandukanye. Ubuhanga bwo gusukura imiti yangiza bukoreshwa cyane mu gusukura ibizinga by'amavuta ku buso bw'ibikoresho, mu byuma bito, no mu miyoboro y'amavuta. Nubwo ubu buryo bwo gusukura bwatejwe imbere, buracyafite ibibazo bimwe na bimwe. Urugero, gusukura umucanga bushobora kwangiza ubuso bwavuwe byoroshye, kandi gusukura imiti yangiza bishobora gutera umwanda ku bidukikije no kwangiza ubuso bwasukuwe iyo budakoreshejwe neza. Ivuka ry'ikoranabuhanga ryo gusukura hakoreshejwe ikoranabuhanga rya laser rigaragaza impinduka mu ikoranabuhanga ryo gusukura. Rikoresha imbaraga nyinshi, ubuhanga bwinshi, no kohereza neza ingufu za laser, kandi rifite inyungu zigaragara ugereranije n'ikoranabuhanga risanzwe ryo gusukura mu bijyanye no gusukura neza, uburyo bwo gusukura neza, n'aho gusukura. Rishobora kwirinda umwanda uterwa no gusukura imiti yangiza n'ubundi buryo bwo gusukura, kandi ntirizangiza substrate.

Itsindaihame ryo gusukura hakoreshejwe laser

None se gusukura laser ni iki? Gusukura laser ni inzira aho umurabyo wa laser ukoreshwa mu gukuraho ibintu ku buso bw'ikintu gikomeye (cyangwa rimwe na rimwe amazi). Iyo umurabyo wa laser ari muke, ibintu bishyushywa n'ingufu za laser zinjiramo hanyuma bigahinduka umwuka cyangwa bigahinduka ivumbi. Iyo umurabyo wa laser uri hejuru, ibintu bikunze guhinduka plasma. Ubusanzwe, gusukura laser bivuga gukuraho ibikoresho hakoreshejwe laser zirimo pulsed, ariko niba imbaraga za laser ari nyinshi bihagije, umurabyo wa laser uhoraho ushobora gukoreshwa mu gukuraho ibikoresho. Laser yo gusukura urumuri rwinshi rwa ultraviolet ikoreshwa cyane cyane mu gukuraho optique. Uburebure bwa laser bukoreshwa mu gukuraho optique ni hafi 200nm. Ubujyakuzimu bw'ingufu za laser n'ingano y'ibikoresho bikurwaho na laser imwe bishingira ku miterere y'ibikoresho, ndetse n'uburebure bw'umurabyo wa laser n'uburebure bw'umurabyo. Uburemere bwose buvanwa ku ntego na buri murabyo wa laser bukunze kwitwa igipimo cyo gukuraho. Umuvuduko wo gushakisha wa laser n'uburyo umurongo wo gushakisha utwikiriye, nibindi, bizagira ingaruka zikomeye ku gikorwa cyo gukuraho.

Ubwoko bw'ikoranabuhanga ryo gusukura hakoreshejwe laser

1) Gusukura hakoreshejwe laser yumye: Gusukura hakoreshejwe laser yumye bivuga imirasire itaziguye y'ikintu gisukura hakoreshejwe laser yumye, bigatuma ibintu byanduye byo hasi cyangwa hejuru byinjiramo ingufu no kwiyongera k'ubushyuhe, bigatuma ubushyuhe bwiyongera cyangwa ubushyuhe buhindagura ishingiro, bityo bigatandukanya byombi. Ubu buryo bushobora kugabanywamo ibintu bibiri: kimwe ni uko ibintu byanduye byo hejuru byinjiramo ingufu za laser kandi bikongera ubushyuhe; ikindi ni uko ishingiro ryinjiramo ingufu za laser kandi rigatanga ubushyuhe buhindagura. Mu 1969, SM Bedair n'abandi bavumbuye ko uburyo butandukanye bwo gutunganya ubuso nko gutunganya ubushyuhe, kwangirika kw'ibinyabutabire, no gusukura umucanga byose bifite imbogamizi zitandukanye. Muri icyo gihe, ubucucike bwinshi bw'ingufu nyuma yo kwibanda kuri laser bushobora gutuma ibintu bihinduka mu kirere, bigatuma habaho gusukura ubuso bw'ibikoresho bidasenya. Binyuze mu igerageza, byagaragaye ko gukoresha laser ya ruby ​​Q-switched ifite ubucucike bw'ingufu bwa 30 MW/cm2 bishobora gusukura ibintu byanduye bya silikoni bitangiza ishingiro, kandi ku nshuro ya mbere, gusukura ibintu byanduye bya laser yumye byagezweho. Igipimo rusange gishobora kugaragazwa n'igipimo cyo gutandukana kw'ibice by'urutonde rwa firime, nk'uko bikurikira:

Muri formula, ε ihagarariye igipimo cy'ingufu za laser pulse, h ihagarariye igipimo cy'ubugari bw'urwego rwa filime ihumanya, naho E ihagarariye igipimo cya elastic modulus cy'urwego rwa filime.

2) Gusukura hakoreshejwe Laser: Mbere yuko igikoresho cyo gusukura gishyirwa kuri laser ikoresha pulse, hakoreshwa firime y'amazi ikoreshwa mbere yo gutwikira hejuru. Mu gihe laser ikoreshwa, ubushyuhe bwa firime y'amazi buzamuka vuba kandi bugahinduka umwuka. Mu gihe cyo gushyuha, havuka umuraba w'ingaruka, ukora ku duce twanduye bigatuma tuva kuri substrate. Ubu buryo busaba ko substrate na firime y'amazi bidakorana, bityo bigabanyiriza ingano y'ibikoresho bikoreshwa. Mu 1991, K. Imen n'abandi. bavuze ku kibazo cy'imyanda ya sub-micron isigaye ku buso bwa wafers za semiconductor n'ibikoresho by'icyuma nyuma yo gukoresha uburyo gakondo bwo gusukura, kandi biga uburyo bwo gusiga firime ku buso bw'ibikoresho bishobora gukurura ingufu za laser neza. Nyuma yaho, hakoreshejwe laser ya CO2, firime yakuruye ingufu za laser maze yongera ubushyuhe ikaranze, ikora vaporize ishyushye, yakuyeho imyanda ku buso bwa substrate. Ubu buryo bwo gusukura bwitwa laser wet cleaning.

3) Gusukura Umuraba wa Plasma Ushyushye wa Laser: Umuraba wa plasma ushyushye wa laser ukorwa iyo laser imurikiye ikirere maze igatuma habaho umuraba wa plasma ushyushye w’uruziga. Umuraba ushyushye ukora ku buso bw’aho igikoresho gikorerwa kugira ngo gisukurwe kandi urekure ingufu zo gukuraho imyanda. Laser ntabwo ikora ku gice cy’imbere, bityo ntigira ingaruka ku gice cy’imbere. Ikoranabuhanga ryo gusukura umuraba wa plasma ushyushye wa laser ubu rishobora gusukura uduce dufite umurambararo wa nanometero mirongo, kandi nta mbogamizi ku burebure bwa laser. Ihame ry’umubiri ryo gusukura plasma rishobora kuvugwa muri make ku buryo bukurikira: a) Umuraba wa laser uva muri laser unyurwa n’urwego rw’ubwandu ku buso bwavuwe. b) Ingano nini y’umuraba ikora plasma ikura vuba (gaze idahindagurika cyane) kandi ikora umuraba w’ingaruka. c) Umuraba ushyushye utuma imyanda icikamo ibice ikakurwaho. d) Ubugari bw’umuraba w’urumuri bugomba kuba bugufi bihagije kugira ngo hirindwe ubwinshi bw’ubushyuhe bushobora kwangiza buso bwavuwe. e) Igerageza ryagaragaje ko iyo hari okiside ku buso bw’icyuma, plasma ikorerwa ku buso bw’icyuma. Plasma ikorwa gusa iyo ubucucike bw'ingufu burenze urugero, bitewe n'urwego rwandujwe cyangwa urwego rwa okiside rwakuweho. Iyi ngaruka y'urwego ni ingenzi cyane mu gusukura neza mu gihe hakorwa isuku nziza mu gihe hakorwa isuku y'ibikoresho bya substrate. Isura ya plasma nayo ifite urugero rwa kabiri. Niba ubucucike bw'ingufu burenze uru rugero, ibikoresho bya substrate bizangirika. Kugira ngo hakorwe isuku neza mu gihe hakorwa isuku nziza mu gihe hakorwa isuku y'ibikoresho bya substrate, ibipimo bya laser bigomba guhindurwa hakurikijwe uko ibintu bimeze kugira ngo ubucucike bw'ingufu z'urumuri rw'umuvuduko buri hagati y'ibipimo bibiri. Mu 2001, JM Lee n'abandi bakoresheje uburyo bwa lasers zifite imbaraga nyinshi zikora plasma shock waves iyo zishyizwe ku murongo, maze bakoresha lasers zifite ingufu zingana na 2.0 J/cm2 (ziruta cyane urugero rw'ibyangiritse bya silicon wafers) kugira ngo zimurike zijyanye na silicon wafer, zisukura neza uduce twa tungsten 1 μm twashyizwe ku buso bwa silicon wafer. Ubu buryo bwo gusukura bwitwa laser plasma shock wave cleaning, kandi mu by'ukuri, laser plasma shock wave cleaning ni ubwoko bwo gusukura rumyuka laser. Intego y’ibanze y’ubu buryo butatu bwo gusukura hakoreshejwe laser kwari ugusukura utuntu duto ku buso bwa wafer za semiconductor. Dushobora kuvuga ko ikoranabuhanga ryo gusukura hakoreshejwe laser ryavutse hamwe n’iterambere ry’ikoranabuhanga rya semiconductor. Ariko, ikoranabuhanga ryo gusukura hakoreshejwe laser ryakomeje gukoreshwa mu zindi nzego, nko gusukura ibumba ry’amapine, gukuraho irangi ry’uruhu rw’indege, no gusana ubuso bw’ibikoresho. Mu gihe cy’imirasire ya laser, umwuka utagira isuku ushobora guhuherwa ku buso bw’ubutaka. Iyo imyanda ikuwe ku buso, izahita ihuherwa na gazi kugira ngo hirindwe ko yongera kwanduza no gushonga k’ubuso.

Itsindaikoreshwa ry'ikoranabuhanga ryo gusukura hakoreshejwe laser

1) Mu rwego rwa semiconductor, gusukura wafer za semiconductor na substrate za optique bikubiyemo inzira imwe, ariyo gutunganya ibikoresho fatizo mu buryo bukenewe binyuze mu gukata, gusya, nibindi. Muri iki gikorwa, hashyirwamo uduce duto twanduza, bigoye gukuraho kandi bigatera ibibazo bikomeye byo kwanduza. Uduce duto twa wafer za semiconductor dushobora kugira ingaruka ku bwiza bw'icapiro rya circuit board, bityo bikagabanya igihe cyo kumara kwa chips za semiconductor. Uduce duto twa optique dushobora kugira ingaruka ku bwiza bw'ibikoresho bya optique n'amabara, kandi bishobora gutuma ingufu zitangana, bikagabanya igihe cyo kumara. Kubera ko gusukura hakoreshejwe laser byumye bishobora kwangiza ubuso bwa substrate, ubu buryo bwo gusukura ntibukoreshwa cyane mu gusukura wafer za semiconductor na substrate za optique. Gusukura hakoreshejwe laser wet na laser plasma shock wave bifite akamaro kanini muri uru rwego. Xu Chuanyi n'abandi biga uburyo irangi ryihariye rya magnetique rishyirwa ku buso bwa substrate za optique zoroshye cyane nka dielectric film, hanyuma bakoresha laser pulsed mu gusukura. Ingaruka zo gusukura zari nziza, nubwo umubare w'uduce twanduye kuri buri gice cy'ubuso wiyongeraga, ingano n'ubuso bw'uduce twanduye byaragabanutse cyane. Ubu buryo bushobora gusukura neza uduce twanduye duto ku buso bw'uduce tw'urumuri tworoheje cyane. Zhang Ping yize ingaruka z'intera yo gukora n'ingufu za laser ku ngaruka zo gusukura uduce dutandukanye tw'uduce twanduye mu ikoranabuhanga ryo gusukura plasma ya laser. Ibisubizo by'igerageza byagaragaje ko ku duce twa polystyrene ku duce tw'ikirahure gitwara amazi, intera nziza yo gukora ku ngufu za 240 mJ yari 1.90 mm. Uko ingufu za laser ziyongeraga, ingaruka zo gusukura zarushijeho kwiyongera cyane, kandi uduce duto twanduye tworoshye gusukura.

2) Mu rwego rw'ibikoresho by'icyuma, gusukura ubuso bw'ibikoresho by'icyuma bitandukanye no gusukura wafers za semiconductor na substrates z'amatara. Imyanda igomba gusukurwa iri mu cyiciro cya macroscopic. Imyanda iri ku buso bw'ibikoresho by'icyuma ahanini irimo urwego rwa okiside (urwego rw'ingufu), urwego rw'irangi, irangi, n'ibindi bifatanye, kandi ishobora gushyirwa mu byiciro by'imyanda ya organic (nk'urwego rw'irangi, irangi) n'imyanda idakomoka ku binyabuzima (nk'urwego rw'ingufu). Gusukura imyanda iri ku buso bw'ibikoresho by'icyuma ahanini bigamije kuzuza ibisabwa mu gutunganya cyangwa gukoresha nyuma, nko gukuraho μm 10 z'urwego rwa okiside ku buso bw'ibice bya titanium alloy mbere yo gusudira, gukuraho irangi ry'umwimerere ku ruhu mu gihe cyo gusana cyane indege kugira ngo byoroshye kongera gutera, no gusukura buri gihe uduce twa rubber dufatanye n'ibumba ry'ipine kugira ngo harebwe isuku y'ubuso n'ubwiza n'ubuzima bw'ibumba. Ingano y'ibyangiritse by'ibikoresho by'icyuma iri hejuru y'ingano y'isuku ya laser y'ibice byabyo. Mu guhitamo laser ikwiye, ingaruka nziza zo gusukura zishobora kugerwaho. Iri koranabuhanga ryakoreshejwe mu buryo bugezweho mu nzego zimwe na zimwe. Wang Lihua n'abandi bigaga ikoreshwa ry'ikoranabuhanga ryo gusukura laser mu kuvura uruhu rwa okiside ku buso bwa aluminiyumu na titaniyumu. Ibyavuye mu bushakashatsi byagaragaje ko gukoresha laser ifite ubucucike bw'ingufu bwa 5.1 J/cm2 bishobora gusukura urwego rwa okiside ku buso bwa aluminiyumu ya A5083-111H mu gihe bikomeza kugira ireme ryiza ry'ubutaka, kandi gukoresha laser ifite ingufu mpuzandengo za 100 W mu buryo bwo gushakisha bishobora gusukura neza urwego rwa okiside ku buso bwa aluminiyumu ya titaniyumu no kunoza ubukana bw'ubuso bw'ibikoresho. Ibigo byo mu gihugu nka Ruike Laser, Daqu Laser, na Shenzhen Chuangxin byakoze ibikoresho byo gusukura laser byakoreshejwe cyane mu gusukura ibumba rya rubber nk'amapine, ibyuma bya rust, n'ibisigazwa by'amavuta ku buso bw'ibice.

3) Mu rwego rw'ibisigazwa by'umuco, gusukura ibisigazwa by'ibyuma n'amabuye n'impapuro ni ngombwa kugira ngo haveho umwanda nk'umwanda n'ibizinga by'iwino bigaragara ku buso bwabyo bitewe n'amateka yabyo maremare. Ibi bisigazwa bigomba gukurwaho kugira ngo hasubizwe ibisigazwa. Ku mpapuro nko kwandika no gushushanya, iyo bibitswe nabi, ibihumyo bikura ku buso bwabyo kandi bigatera utudomo. Ibi bihumyo bigira ingaruka zikomeye ku isura y'umwimerere y'impapuro, cyane cyane ku mpapuro zifite agaciro gakomeye k'umuco cyangwa amateka, ibyo bizagira ingaruka ku gaciro kazo no kubirindwa. Zhao Ying n'abandi. biga ku buryo bwo gukoresha laser ya ultraviolet mu gusukura utudomo tw'ibihumyo ku mpapuro. Ibisubizo by'igerageza byagaragaje ko gukoresha laser ifite ubucucike bw'ingufu bwa 3.2 J/mm2 mu gushakisha rimwe bishobora gukuraho utudomo duto, kandi gushakisha kabiri bishobora gukuraho utudomo burundu. Ariko, niba ingufu za laser zikoreshwa ari nyinshi cyane, byangiza umuzingo w'impapuro mu gihe bikuraho utudomo. Zhang Xiaotong n'abandi. Bashoboye gusana igice cy'umuringa cya zahabu bakoresheje uburyo bwa laser vertical irradiation liquid film. Zhang Licheng n'abandi. bakoresheje ikoranabuhanga ryo gusukura hakoreshejwe laser mu gusana ishusho y’abagore bashushanyijeho ibumba ryakozwe mu gihe cy’ingoma ya Han. Yuan Xiaodong n’abandi bigaga ingaruka z’ikoranabuhanga ryo gusukura hakoreshejwe laser mu gusukura ibisigazwa by’amabuye, banagereranya ibyangiritse ku mubiri w’amabuye mbere na nyuma yo gusukura, ndetse n’ingaruka zo gusukura ibara ry’ibara, umwanda w’umwotsi n’irangi.

Umwanzuro: Ikoranabuhanga ryo gusukura laser ni tekiniki iteye imbere, ifite ubushakashatsi bwagutse n'ubushobozi bwo kuyikoresha mu nzego zikora neza cyane nko mu kirere, ibikoresho bya gisirikare, n'ikoranabuhanga n'amashanyarazi. Muri iki gihe, ikoranabuhanga ryo gusukura laser ryakoreshejwe neza mu nzego zimwe na zimwe, bitewe n'imikorere yaryo myiza, itangiza ibidukikije, kandi isuku nziza. Ahantu rikoreshwa riri kwiyongera buhoro buhoro. Iterambere ry'ikoranabuhanga ryo gusukura laser ntiryakoreshejwe gusa mu bice nko gukuraho irangi no gukuraho ingese, ahubwo hagaragaye n'amakuru yo gukoresha laser mu gusukura urwego rwa okiside ku nsinga z'icyuma mu myaka ya vuba aha. Kwaguka kw'ahantu hakoreshwa laser no guteza imbere imirima mishya ni ishingiro ry'iterambere ry'ikoranabuhanga ryo gusukura laser. Ubushakashatsi n'iterambere ry'ibikoresho bishya byo gusukura laser no guteza imbere ibikoresho bishya byo gusukura laser bizagaragaza itandukaniro, bigatanga imikorere itandukanye. Mu gihe kizaza, kugera ku gusukura laser byikora binyuze mu bufatanye n'amarobo yo mu nganda nabyo birashoboka. Iterambere ry'ikoranabuhanga ryo gusukura laser ni iri rikurikira:

(1) Gushimangira ubushakashatsi ku nyigisho yo gusukura hakoreshejwe laser kugira ngo buyobore ikoreshwa ry'ikoranabuhanga ryo gusukura hakoreshejwe laser. Nyuma yo gusuzuma inyandiko nyinshi, byagaragaye ko nta buryo bugezweho bw'inyigisho bushyigikira ikoranabuhanga ryo gusukura hakoreshejwe laser, kandi ubushakashatsi bwinshi bushingiye ku bushakashatsi. Gushyiraho uburyo bwo gusukura hakoreshejwe laser ni ishingiro ry'iterambere rirambye n'iterambere ry'ikoranabuhanga ryo gusukura hakoreshejwe laser.

(2) Kwagura imirima isanzwe ikoreshwa n'imirima mishya ikoreshwa. Ikoranabuhanga ryo gusukura hakoreshejwe laser ryakoreshejwe neza mu bice nko gukuraho irangi no gukuraho ingese, kandi hari raporo zagaragaje ko hakoreshejwe laser mu gusukura urwego rwa okiside ku nsinga z'icyuma mu myaka ya vuba aha. Kwagura imirima isanzwe ikoreshwa n'iterambere ry'imirima mishya ni ubutaka bwiza bugamije iterambere ry'ikoranabuhanga ryo gusukura hakoreshejwe laser.

(3) Ubushakashatsi n'iterambere ry'ibikoresho bishya byo gusukura hakoreshejwe laser. Guteza imbere ibikoresho bishya byo gusukura hakoreshejwe laser bizagaragaza itandukaniro. Ubwoko bumwe ni ibikoresho bifite uburyo bwihariye bwo gukoresha ahantu henshi hakoreshwa, nk'aho igikoresho kimwe gishobora gukora imirimo yo gukuraho irangi no gukuraho ingese icyarimwe. Ubundi bwoko ni ibikoresho byihariye bigamije ibyo bikenewe byihariye, nko gushushanya ibikoresho byihariye cyangwa imigozi y'urumuri kugira ngo bigere ku nshingano zo gusukura imyanda mu mwanya muto. Binyuze mu bufatanye n'amarobo yo mu nganda, gusukura hakoreshejwe laser byikora nabyo ni icyerekezo gikunzwe cyane cyo gukoresha.