Ikoranabuhanga ryo gusukura hakoreshejwe laserni uburyo bwiza bwo gukoresha ikoranabuhanga rya laser mu rwego rw'ubuhanga. Ihame ryayo ry'ibanze rikoresha ingufu nyinshi za laser kugira ngo habeho imikoranire hagati y'imirasire ya laser n'imyanda ifata ku bikoresho by'akazi. Imyanda itandukanywa n'imyanda binyuze mu kwagura ubushyuhe ako kanya, gushonga, gushonga kwa gaze n'izindi nzira. Kubera ko ifite ubushobozi bwo gukora neza, ibungabunga ibidukikije no kubungabunga ingufu, ikoranabuhanga ryo gusukura laser ryakoreshejwe neza mu gusukura ibumba ry'amapine, gukuraho irangi ry'umubiri w'indege, gusana ibisigazwa by'umuco n'ibindi bikorwa.
Ikoranabuhanga gakondo ryo gusukura ririmo gusukura imiyoboro ya mashini (gusukura umucanga, gusukura amazi hakoreshejwe umuvuduko mwinshi, nibindi), gusukura imiti ya shimi, gusukura hakoreshejwe ikoranabuhanga, gusukura urubura rwumutse nibindi. Ubu buryo bukoreshwa cyane mu nganda. Urugero, gutwika umucanga bishobora gukuraho ingese z'icyuma, gutwikira hejuru n'udupira tw'ibumba ku mbaho z'amashanyarazi binyuze mu guhitamo ibintu bitandukanye bikomeye. Gusukura imiti ya shimi bikoreshwa cyane mu gukuraho amavuta ku buso bw'ibikoresho, gusukura imiyoboro ya shawari no gufungura imiyoboro ya lisansi. Nubwo byakuze, uburyo gakondo bufite imbogamizi zigaragara: gutwika umucanga byangiza byoroshye ubuso bwavuwe, kandi gusukura imiti ya shimi bitera umwanda ku bidukikije kandi bishobora kwangiza substrates iyo bidakoreshejwe neza. Kuvuka kwa laser bigaragaza impinduka mu ikoranabuhanga ryo gusukura. Gukoresha ingufu nyinshi za laser, uburyo bwiza kandi bunoze bwo kohereza, gusukura laser birusha uburyo gakondo mu gusukura neza, gukora neza no gushyira ahantu. Bikuraho umwanda ukomoka ku gusukura imiti kandi ntibitera kwangirika ku substrates.
Amahame yo gusukura hakoreshejwe laser
Gusukura hakoreshejwe laser ni iki mu by'ukuri? Bivuga inzira yo gukuramo ibintu ku buso bukomeye (cyangwa rimwe na rimwe amazi) binyuze mu mirasire ya laser. Iyo laser ifunguye cyane, ingufu za laser zishyushye zigatuma ibintu bihinduka umwuka cyangwa bigahinduka sublimation. Iyo laser ifunguye cyane, ibikoresho bihinduka plasma. Gusukura hakoreshejwe laser ikoresha pulsed lasers mu gukuraho ibikoresho, nubwo laser ikoresha continuous wave beams ishobora gukuraho ibikoresho ku bushyuhe buhagije. Laser ikoresha deep ultraviolet excimer, ifite uburebure bwa 200 nm, ikoreshwa cyane cyane mu gufotora.
Ubujyakuzimu bwaingufu za laserUburyo bwo kwinjiza n'ingano y'ibikoresho bikurwa kuri buri terasi biterwa n'imiterere y'urumuri rw'ibikoresho, ndetse n'uburebure bw'umuvuduko wa laser n'igihe terasi imara. Uburemere bwose buvanwa ku ntego kuri buri terasi busobanurwa nk'igipimo cyo kwinjiza. Imiterere y'imirasire ya laser nko kwihuta mu gushakisha no gukwirakwira k'umurongo bigira ingaruka zikomeye ku nzira yo kwinjiza.
Ubwoko bw'ikoranabuhanga ryo gusukura hakoreshejwe laser
1) Gusukura hakoreshejwe laser
Gusukura hakoreshejwe laser bikubiyemoImirasire ya laser ikoresha ikoranabuhanga rya "direct pulsed laser". Uduce twanduye cyangwa uduce twa "substrate" dufata ingufu za laser, bikazamura ubushyuhe bwabyo bigatera kwaguka k'ubushyuhe cyangwa "substrate thermal vibration", ibyo bikaba bitandukanya uduce twanduye n'uduce twa "substrate". Bibaho mu buryo bubiri: uduce twanduye two hejuru dufata ingufu za laser tugakura, cyangwa uduce twanduye dufata ingufu tugahindagura ubushyuhe.
Mu 1969, SM Bedair n'abandi basanze uburyo busanzwe bwo kuvura ubuso (gushyushya, kwangirika kw'ibinyabutabire, guturitsa umucanga) byose bifite imbogamizi. Babonye ko imbaraga nyinshi za laser zicungwa zishobora gushonga ibikoresho byo ku butaka nta kwangiza substrate. Ubushakashatsi bwemeje ko laser ya ruby ya Q-switched ifite imbaraga zingana na MW 30/cm² ishobora gusukura imyanda ku buso bwa silicon nta kwangirika kwa substrate, bikaba ari byo byabaye ishyirwa mu bikorwa rya mbere ryo gusukura byumye hakoreshejwe laser.
Igipimo rusange cyo gusukura gishobora kugaragazwa binyuze mu gipimo cyo gukuraho imyanda ya firime, nk'uko bigaragara hano hepfo:
(Formule: ε—ikipimo cy'ingufu za laser pulse; h—ikipimo cy'ubugari bwa filime yanduye; E—ikipimo cy'ubugari bwa filime elastic modulus)
2) Gusukura hakoreshejwe laser
Mbere yo gukoresha imirasire ya laser, agace k'amazi gashyirwa ku buso bw'aho bikora. Ingufu za laser zishyushya vuba kandi zigahindura ikirere, bigatuma ako kanya hasohoka uduce twanduye dukurwa muri substrate. Ubu buryo ntibusaba imikorere ya shimi hagati y'agace k'amazi n'agace k'amazi, bigagabanya ibikoresho byako.
Mu 1991, K. Imen n'abandi bavuze ku bisigazwa bya submicron bya wafers na metali nyuma yo gusukurwa bisanzwe. Basize substrates filimi ifata laser maze bayishyiramo laser ya CO₂. Filimi yafataga ingufu, ishyuha vuba, irabira kandi irashyuha cyane, ikuraho ibintu byanduye ku buso—ibi bisobanura ko isuku ya laser ikozwe mu mazi.
3) Gusukura plasma shockwave hakoreshejwe laser
Imiraba ya plasma ya laser ibaho iyo laser ihinduye umwuka mu miraba ya plasma mu gihe cyo kunyuramo imirasire. Iyi miraba ikubita ku miraba, irekura ingufu zo gukuraho imyanda idakozeho (laser ntikorana neza n'imiraba). Ubu buryo bwoza uduce duto nka nanometero icumi kandi ntibushyiraho imipaka ku bunini bwa laser.
Amahame ngenderwaho yo gusukura plasma akubiye muri aya magambo:
a) Imirasire ya laser inyurwa n'urwego rw'umwanda ruri ku buso bw'ikintu kigamije.
b) Gufata ingufu nyinshi birema plasma ikura vuba cyane (gaze idahindagurika cyane), bigatera imiraba itunguranye.
c) Imvura y'amahindu igabanyamo ibice ikanakuraho imyanda.
d) Imitsi ya laser igomba kuba ngufi bihagije kugira ngo hirindwe ko ubushyuhe bwiyongera bwangiza substrate.
e) Igerageza ryerekana imiterere ya plasma ku buso bw'icyuma iyo okiside ihari.
Kubyara plasma biba hejuru y’umubare w’ingufu, bitewe n’umubare w’ingufu cyangwa urwego rwa okiside rugomba gukurwaho. Hari undi mubare w’ingufu urenze uwo mubare w’ingufu, aho substrate yangirika. Kugira ngo isukurwa neza nta ngaruka mbi ku substrate, ibipimo bya laser bigomba guhindurwa kugira ngo ingufu z’ingufu zigume hagati y’umubare w’ingufu ebyiri.
Mu 2001, JM Lee n'abandi bakoresheje imiraba ya plasma ituruka kuri lasers zikomeye. Laser ifite ingufu zingana na 2.0 J/cm² (irenze kure urugero rwa silicon) yatwikirije silicon wafers icyarimwe, ikuraho neza uduce twa tungsten twa 1 μm. Mu by'ukuri, gusukura plasma shockwave ni igice cy'isukura ryumye.
Ubwo buryo butatu bwo gusukura hakoreshejwe laser bwatangiye gukoreshwa kugira ngo bukureho uduce duto cyane mu tumashini twa semiconductor wafers, bwagiye butera imbere bugera ku gusukura ibumba ry’amapine, gukuraho irangi ry’uruhu rw’indege, gusana ibisigazwa by’umuco n’ibindi. Imyuka idafite isuku ishobora guhuherwa ku byuma mu gihe cyo gutanga imirasire ya laser kugira ngo ikureho ako kanya imyanda yakuweho, hirindwe ko yangirika cyangwa ngo ihinduke.
Imikoreshereze y'ikoranabuhanga ryo gusukura hakoreshejwe laser
1) Inganda zikora ibikoresho bya semiconductor: Gusukura ibikoresho bya semiconductor na substrate z'amaso
Uduce twa semiconductor na substrate optique bikorerwa mu ntambwe zimwe zo gutunganya (gukata, gusya) kugira ngo bikore imiterere ikenewe, bigashyiramo uduce twanduye bigoye gukuraho kandi dushobora kwangirika. Uduce twanduye kuri wafers twangiza ubwiza bwa circuit printing kandi bikagabanya igihe cyo kumara kwa chips. Ku duce twa optique, twangiza imikorere ya optique n'ingufu, bigatuma ingufu zikwirakwira mu buryo butari bumwe kandi ubuzima bwa serivisi bukagabanuka.
Gusukura hakoreshejwe laser ntikunze gukoreshwa hano bitewe n’ingaruka zo kwangirika kw’ubutaka, mu gihe gusukura amazi no gusukura plasma shockwave bifite akamaro kenshi. Xu Chuanyi n'abandi bashyize irangi rya micro-scale magnetic nk'ishusho ya dielectric ku byuma by'urumuri byoroshye cyane, bituma isuku ya laser ikoreshwa neza. Nubwo ibice by'umwanda byose byiyongereye, ingano yabyo n'uburyo bitwikiriye byagabanutse cyane. Zhang Ping yize ingaruka z'intera yo gukora n'ingufu za laser ku bushobozi bwo gusukura ibice by'ingano zitandukanye. Igerageza ryagaragaje ko laser ya 240 mJ yageze ku isuku nziza y'ibice bya polystyrene ku kirahuri gitwara amazi ku ntera ya 1.90 mm yo gukora. Isuku yarushijeho kuba nziza hamwe n'ingufu nyinshi za laser, kandi ibice binini byoroshye kubikuraho.
2) Inganda z'ibyuma: Gusukura ubuso bw'ibyuma
Gusukura icyuma ku buso bwacyo bigamije ibintu bihumanya ikirere: imiterere ya okiside/ingese, irangi, irangi n'ibindi bifatanye, bishyirwa mu byiciro by'ibintu bihumanya ikirere (irangi, irangi) cyangwa ibintu bidafite umwimerere (ingese). Gusukura byujuje ibisabwa nyuma yo gutunganya/gukoresha: urugero, gukuraho imiterere ya okiside ifite ubugari bwa μm 10 mu byuma bya titaniyumu mbere yo gusudira, gukuraho irangi mu ruhu rw'indege kugira ngo ryongere gusiga irangi, no gusukura ibisigazwa bya kabutike mu byuma bitunganya amapine kugira ngo hamenyekane ko ibicuruzwa bifite ubuziranenge kandi ko irangi rirambye.
Ibyuma bifite ubushobozi bwo kwangiza bwinshi kurusha urwego rwo gusukura ibintu byanduye, bigatuma bisukurwa neza hakoreshejwe laser zikoresha ingufu zikwiye. Mu bikorwa byakuze harimo: Wang Lihua n'abandi bagaragaje ko laser ya 5.1 J/cm² yakuyeho urwego rwa oxide muri aluminiyumu ya A5083-111H mu gihe ikomeza ubuziranenge bwa substrate, naho laser ya 100 W ikoresha pulsed yasukuye neza urwego rwa oxide ya titanium alloy kandi yongera ubukana bw'ubuso. Inganda zikora mu ngo (Raycus Laser, Han's Laser, Shenzhen Chuangxin) zitanga ibikoresho byo gusukura laser cyane ku bimera bya rubber, ingese z'icyuma no gukuraho amavuta.
3) Kubungabunga ibisigazwa by'umuco: Gusukura ibisigazwa by'umuco n'impapuro
Ibisigazwa by'amabuye n'iby'umuco byiyongeraho umwanda, ibara ry'iwino n'ibindi bihumanya uko igihe kigenda gihita, bigasaba gukurwaho kugira ngo bisubize isura yabyo y'umwimerere. Ibikoresho by'impapuro (amashusho, inyandiko zanditswe) bikuramo ifu n'ibyapa mu gihe bibitswe nabi, bikangiza cyane imiterere yabyo n'agaciro k'umuco/amateka.
Zhao Ying n'abandi bemeza ko isuku ya UV kuri plaque z'ibihumyo ku mpapuro z'umuceri yakozwe na laser: gupima rimwe kuri 3.2 J/mm² byakuyeho plaque nto, mu gihe scan ebyiri zakuyeho burundu; ingufu nyinshi za laser zangije impapuro. Zhang Xiaotong yasubije neza ikintu cy'umuringa cyakozwe na zahabu akoresheje uburyo bwa laser butose. Zhang Licheng yakoresheje laser ku ishusho y'abagore yashushanyijeho ibumba ryo mu gihe cya Han. Yuan Xiaodong n'abandi bemezaga ko isuku ya laser ikora ku mabuye, bagereranya ibyangiritse ku butaka n'uburyo bwo gukuraho wino, umwotsi n'irangi ku mabuye.
Umwanzuro
Gusukura hakoreshejwe laser ni ikoranabuhanga rigezweho rifite ubushakashatsi bwagutse n'ubushobozi bwo gukoresha mu kirere, ibikoresho bya gisirikare, ibikoresho by'ikoranabuhanga n'ibindi bikoresho bigezweho. Rimaze gukura mu nganda nyinshi bitewe n'imikorere yaryo, ubuziranenge bw'ibidukikije n'umusaruro mwiza wo gusukura, ikoreshwa ryaryo rikomeje kwaguka. Uretse gukuraho irangi n'ingese, iterambere riherutse gutera ririmo gusukura imiterere ya okiside ku nsinga z'icyuma hakoreshejwe laser. Iterambere ry'ejo hazaza rishingiye ku kwagura ikoreshwa risanzweho, kwinjira mu nzego nshya no guhanga udushya ibikoresho:
- Komeza ubushakashatsi bw’imitekerereze kugira ngo buyobore ishyirwa mu bikorwa ry’imyitozo ngororamubiri. Ubushakashatsi buriho bushingiye cyane ku bushakashatsi, budafite urwego rw’imitekerereze rukuze. Gushyiraho urwego nk’urwo ni ingenzi kugira ngo ikoranabuhanga rigere ku iterambere.
- Kwagura ibikorwa mu mirima isanzwe n'imishya. Imaze gukuraho irangi/ingese, ikoreshwa rigaragara ririmo gusukura icyuma gikozwe muri okiside, bigatanga ubutaka bwiza bwo gukuramo.
- Gutegura ibikoresho bishya byo gusukura hakoreshejwe laser, bivamo ibikoresho bikoreshwa mu buryo butandukanye (urugero, gukuraho irangi/ingese) n'ibikoresho byihariye (urugero, ibikoresho byihariye/insinga zo mu myanya ifunze). Ikoranabuhanga ryuzuye binyuze mu guhuza na robo z'inganda ni icyerekezo cyiza.
Igihe cyo kohereza ubutumwa: Gicurasi-14-2026
