Nubwo ultrafast laseri imaze imyaka mirongo, ikoreshwa ryinganda ryakuze vuba mumyaka 20 ishize. Muri 2019, agaciro k'isoko rya ultrafastibikoresho bya lasergutunganya byari hafi miliyoni 460 US $, hamwe n’ubwiyongere buri mwaka bwa 13%. Ahantu ho gukoreshwa aho laseri ya ultrafast yakoreshejwe neza mugutunganya ibikoresho byinganda harimo guhimba fotomask no gusana munganda za semiconductor kimwe no gushushanya silikoni, gukata ibirahuri / kwandika hamwe na (indium tin oxide) ITO ikuraho firime muri elegitoroniki y’abaguzi nka terefone zigendanwa na tableti , piston yerekana inganda zitwara ibinyabiziga, gukora coronary stent no gukora microfluidic ibikoresho byinganda zubuvuzi.
01 Gukora Photomask no gusana munganda ziciriritse
Ultrafast lazeri yakoreshejwe murimwe mubikorwa byambere byinganda mugutunganya ibikoresho. IBM yatangaje ko ikoreshwa rya femtosekond laser yogukuramo umusaruro wa fotomask mu myaka ya za 90. Ugereranije no gukuraho lazeri ya nanosekond, ishobora kubyara ibyuma no kwangirika kwikirahure, masike ya laser ya femtosekond yerekana nta cyuma cyangiza, nta byangiza ikirahure, nibindi byiza. Ubu buryo bukoreshwa mugukora imiyoboro ihuriweho (IC). Gukora chip ya IC birashobora gusaba masike zigera kuri 30 kandi bigura> $ 100,000. Gutunganya laser ya Femtosekond irashobora gutunganya imirongo ningingo ziri munsi ya 150nm.
Igishushanyo 1. Guhimba Photomask no gusana
Igishushanyo 2. Gukwirakwiza ibisubizo byuburyo butandukanye bwa mask ya ultraviolet lithographie ikabije
02 Gukata Silicon mu nganda ziciriritse
Igishushanyo cya silicon wafer nigikorwa gisanzwe cyo gukora munganda ziciriritse kandi mubisanzwe bikorwa hakoreshejwe imashini. Izi nziga zo gukata akenshi zikora microcrack kandi biragoye guca intege (urugero uburebure <150 μ m) wafer. Gukata lazeri ya wafer ya silicon yakoreshejwe mu nganda za semiconductor mu myaka myinshi, cyane cyane kuri waferi yoroheje (100-200μm), kandi bigakorwa mu ntambwe nyinshi: gusunika lazeri, bigakurikirwa no gutandukanya imashini cyangwa gukata ubujura (ni ukuvuga urumuri rwa lazeri imbere inyandiko ya silicon) ikurikirwa no gutandukanya kaseti. Laser ya nanosecond pulse irashobora gutunganya wafer 15 kumasaha, naho laser ya picosekond irashobora gutunganya wafer 23 kumasaha, hamwe nubwiza buhebuje.
03 Gukata ibirahuri / kwandika mu nganda zikoresha ibikoresho bya elegitoroniki
Gukoraho ecran hamwe nikirahure kirinda terefone zigendanwa na mudasobwa zigendanwa bigenda byoroha kandi imiterere ya geometrike iragoramye. Ibi bituma gukata imashini gakondo bigorana. Lazeri isanzwe itanga ubuziranenge bwaciwe, cyane cyane iyo ibyo birahure byerekanwe mubirindiro 3-4 kandi hejuru ya 700 mkm yibirahure birinda ubushyuhe, bishobora gucika hamwe nihungabana ryaho. Ultrafast laseri yerekanwe gushobora guca ibirahuri n'imbaraga nziza. Kuburyo bunini bwo gukata, lazeri ya femtosekond irashobora kwerekeza hejuru yinyuma yurupapuro rwikirahure, igashushanya imbere yikirahure itangije imbere. Ikirahure kirashobora kumeneka ukoresheje uburyo bwa mashini cyangwa ubushyuhe ukurikije amanota yatanzwe.
Igishushanyo 3. Picosekond ultrafast laser ikirahuri kidasanzwe
04 Imyenda ya piston mu nganda zimodoka
Moteri yimodoka yoroheje ikozwe muri aluminiyumu, idashobora kwihanganira kwambara nkicyuma. Ubushakashatsi bwerekanye ko lazeri ya femtosekond itunganya imodoka ya piston yimodoka ishobora kugabanya ubukana kugera kuri 25% kuko imyanda namavuta bishobora kubikwa neza.
Igicapo 4. Gutunganya laser ya Femtosecond ya piston ya moteri yimodoka kugirango tunoze imikorere ya moteri
05 Coronary stent inganda mubikorwa byubuvuzi
Amamiriyoni yimitsi ya coronari yatewe mumitsi yumubiri yumubiri kugirango ifungure umuyoboro wamaraso atembera mubindi bikoresho byambaye, bikiza abantu miriyoni buri mwaka. Ububiko bwa Coronary mubusanzwe bukozwe mubyuma (urugero, ibyuma bidafite ingese, nikel-titanium imiterere yibikoresho byo kwibuka, cyangwa vuba aha cobalt-chromium alloy) inshundura zinsinga zifite ubugari bwa metero 100. Ugereranije no gukata lazeri ndende, ibyiza byo gukoresha lazeri ultrafast kugirango ugabanye utwugarizo ni byiza gukata neza, kurangiza neza neza, hamwe n’imyanda mike, bigabanya ibiciro nyuma yo gutunganywa.
06 Gukora ibikoresho bya Microfluidic inganda zubuvuzi
Ibikoresho bya Microfluidic bikoreshwa cyane mubikorwa byubuvuzi mugupima indwara no gusuzuma. Ubusanzwe bikozwe na micro-inshinge yibumba yibice hanyuma ugahuza ukoresheje kashe cyangwa gusudira. Ultrafast laser guhimba ibikoresho bya microfluidic ifite ibyiza byo gukora microchannel ya 3D mubikoresho bisobanutse nkikirahure bidakenewe guhuza. Uburyo bumwe ni ibihimbano bya ultrafast imbere yikirahure kinini gikurikirwa no guterwa imiti itose, naho ubundi ni lazeri ya femtosekond imbere mu kirahure cyangwa plastike mumazi yatoboye kugirango ikureho imyanda. Ubundi buryo ni ugukoresha imiyoboro yimashini hejuru yikirahure hanyuma ukayifunga hamwe nigifuniko cyikirahuri ukoresheje femtosekond laser welding.
Igicapo 6. Femtosecond laser-iterwa no gutoranya guhitamo gutegura imiyoboro ya microfluidic imbere mubikoresho byikirahure
07 Gucukura Micro yo gutera inshinge
Imashini ya Femtosecond laser microhole yasimbuye micro-EDM kumasosiyete menshi mumasoko yatewe inshinge nyinshi kubera guhinduka kwinshi muguhindura imyirondoro yimyanda nigihe gito cyo kuyikora. Ubushobozi bwo guhita bugenzura umwanya wibanze hamwe no kugoreka kumurongo ukoresheje scan yabanje gusikana byatumye habaho igishushanyo mbonera cya aperture (urugero, ingunguru, urumuri, guhuza, gutandukana) bishobora guteza atomisiyasi cyangwa kwinjira mubyumba byaka. Igihe cyo gucukura giterwa nubunini bwo gukuramo, hamwe nubunini bwa 0.2 - 0,5 mm na diameter ya mwobo wa 0,12 - 0,25 mm, bigatuma ubu buhanga bwihuta inshuro icumi kurenza micro-EDM. Microdrilling ikorwa mubyiciro bitatu, harimo gukomera no kurangiza binyuze mu ndege. Argon ikoreshwa nka gaze yingirakamaro kugirango irinde umwobo okiside no gukingira plasma yanyuma mugihe cyambere.
Igicapo 7
08 Ultra-yihuta ya laser
Mu myaka yashize, kugirango tunonosore neza imikorere yimashini, kugabanya ibyangiritse, no kongera imikorere yo gutunganya, urwego rwa micromachining rwagiye rwibandwaho nabashakashatsi. Ultrafast laser ifite ibyiza bitandukanye byo gutunganya nko kwangirika guke hamwe nubusobanuro buhanitse, bwabaye intego yo guteza imbere iterambere ryikoranabuhanga ritunganya. Mugihe kimwe, laseri ya ultrafast irashobora gukora kubikoresho bitandukanye, kandi ibyangiritse byo gutunganya laser nabyo ni icyerekezo gikomeye cyubushakashatsi. Ultrafast laser ikoreshwa mugukuraho ibikoresho. Iyo ingufu zingana za lazeri zirenze igipimo cyo gukuraho ibintu, hejuru yibikoresho byavanyweho bizerekana imiterere ya micro-nano ifite ibintu bimwe na bimwe biranga. Ubushakashatsi bwerekana ko iyi sura idasanzwe Imiterere nikintu gisanzwe kibaho mugihe ibikoresho byo gutunganya laser. Gutegura hejuru ya micro-nano yubatswe birashobora kunoza imiterere yibikoresho ubwabyo kandi bigafasha iterambere ryibikoresho bishya. Ibi bituma imyiteguro yubutaka bwa micro-nano ikorwa na ultrafast laser uburyo bwa tekiniki ifite akamaro gakomeye mu iterambere. Kugeza ubu, kubikoresho byicyuma, ubushakashatsi kuri ultrafast laser yubuso burashobora kunoza imiterere yicyuma cyo hejuru, kunoza ubwumvikane buke no kwambara, kongera ubwuzuzanye, hamwe no gukwirakwizwa kwerekezo hamwe no gufatira ingirabuzimafatizo.
Igicapo 8. Ibiranga superhydrophobique ya lazeri yateguwe na silicon
Nka tekinoroji igezweho yo gutunganya, gutunganya ultrafast laser ifite ibiranga akarere gato gaterwa nubushyuhe, inzira itari umurongo wo guhuza ibikoresho, hamwe no gutunganya cyane birenze imipaka. Irashobora gutahura ubuziranenge kandi buhanitse-micro-nano gutunganya ibikoresho bitandukanye. na bitatu-bingana na micro-nano imiterere yo guhimba. Kugera kuri laser yo gukora ibikoresho bidasanzwe, imiterere igoye nibikoresho bidasanzwe byugurura inzira nshya zo gukora micro-nano. Kugeza ubu, lazeri ya femtosekond yakoreshejwe cyane mubice byinshi bya siyansi bigezweho: lazeri ya femtosekond irashobora gukoreshwa mugutegura ibikoresho bitandukanye bya optique, nka microlens array, amaso ya bionic compound, optique ya optique na metasurface; ukoresheje ibisobanuro byayo bihanitse, bihanitse cyane hamwe nubushobozi butatu bwo gutunganya, laser femtosekond irashobora gutegura cyangwa guhuza microfluidic na optofluidic chip nkibice bya microheater hamwe numuyoboro wa microfluidic; hiyongereyeho, laser femtosekond irashobora kandi gutegura ubwoko butandukanye bwubutaka bwa micro-nanostructures kugirango igere kubirwanya, kurwanya-kwigaragaza, super-hydrophobique, anti-icing nibindi bikorwa; sibyo gusa, lazeri ya femtosekond nayo yakoreshejwe mubijyanye na biomedicine, yerekana imikorere igaragara mubice nka micro-stent biologique, umuco w'utugingo ngengabuzima hamwe na mikorosikopi yibinyabuzima. Ibyifuzo byinshi byo gusaba. Kugeza ubu, imirima yo gusaba ya femtosekond laser itunganya igenda yiyongera uko umwaka utashye. Usibye micro-optique yavuzwe haruguru, microfluidics, micro-nanostructures ikora cyane hamwe na tekinoroji ya biomedical engineering, inagira uruhare runini mubice bimwe na bimwe bigenda bigaragara, nko gutegura metasurface. , micro-nano gukora no kubika amakuru menshi yo kubika amakuru, nibindi.
Igihe cyo kohereza: Apr-17-2024
